DIN 50451-3 Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 3: Determination of 31 elements in high-purity nitric acid by ICP-MS
Данный раздел/документ содержится в продуктах:
- Техэксперт: Машиностроительный комплекс
- Картотека зарубежных и международных стандартов
- DIN 50451-3 Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 3: Determination of 31 elements in high-purity nitric acid by ICP-MS
- 29
- DIN 50451-3 Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 3: Determination of 31 elements in high-purity nitric acid by ICP-MS
- 29.045
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- ISO 12233 Photography - Electronic still picture imaging - Resolution and spatial frequency responses - Second Edition
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- DIN ISO 18901 Imaging materials - Processed silver-gelatin-type black-and-white films - Specifications for stability (ISO 18901:2010)
- DIN 4512-8 Photographic sensitometry, determination of optical density; geometric conditions for transmission density
- DIN ISO 18901 Imaging materials - Processed silver-gelatin-type black-and-white films - Specifications for stability (ISO 18901:2010)
- ISO 6328 Photography - Photographic Materials - Determination of ISO Resolving Power - Second Edition; Corrected and Reprinted 09/01/2000
- ISO 12233 Photography - Electronic still picture imaging - Resolution and spatial frequency responses - Second Edition
- BSI BS ISO/IEC 19794-8 + A1 Information technology - Biometric data interchange formats Part 8: Finger pattern skeletal data - CORR: May 31, 2012; AMD: May 31, 2014
- 35
- ISO ISO/IEC 7816-4 Identification cards - Integrated circuit cards - Part 4: Organization, security and commands for interchange - Third Edition
- BSI BS ISO/IEC 19794-8 + A1 Information technology - Biometric data interchange formats Part 8: Finger pattern skeletal data - CORR: May 31, 2012; AMD: May 31, 2014
- ISO 12233 Photography - Electronic still picture imaging - Resolution and spatial frequency responses - Second Edition
- ISO 6328 Photography - Photographic Materials - Determination of ISO Resolving Power - Second Edition; Corrected and Reprinted 09/01/2000
- DIN ISO 18901 Imaging materials - Processed silver-gelatin-type black-and-white films - Specifications for stability (ISO 18901:2010)
- DIN 4512-8 Photographic sensitometry, determination of optical density; geometric conditions for transmission density
- DIN ISO 18901 Imaging materials - Processed silver-gelatin-type black-and-white films - Specifications for stability (ISO 18901:2010)
- ISO 6328 Photography - Photographic Materials - Determination of ISO Resolving Power - Second Edition; Corrected and Reprinted 09/01/2000
- ISO 12233 Photography - Electronic still picture imaging - Resolution and spatial frequency responses - Second Edition
- BSI BS ISO/IEC 19794-8 + A1 Information technology - Biometric data interchange formats Part 8: Finger pattern skeletal data - CORR: May 31, 2012; AMD: May 31, 2014
- ISO ISO/IEC 7816-4 Identification cards - Integrated circuit cards - Part 4: Organization, security and commands for interchange - Third Edition
- BSI BS ISO/IEC 19794-8 + A1 Information technology - Biometric data interchange formats Part 8: Finger pattern skeletal data - CORR: May 31, 2012; AMD: May 31, 2014
- ISO 12233 Photography - Electronic still picture imaging - Resolution and spatial frequency responses - Second Edition
- ISO 6328 Photography - Photographic Materials - Determination of ISO Resolving Power - Second Edition; Corrected and Reprinted 09/01/2000
- DIN ISO 18901 Imaging materials - Processed silver-gelatin-type black-and-white films - Specifications for stability (ISO 18901:2010)
- DIN 4512-8 Photographic sensitometry, determination of optical density; geometric conditions for transmission density
- DIN ISO 18901 Imaging materials - Processed silver-gelatin-type black-and-white films - Specifications for stability (ISO 18901:2010)
- ISO 6328 Photography - Photographic Materials - Determination of ISO Resolving Power - Second Edition; Corrected and Reprinted 09/01/2000
- ISO 12233 Photography - Electronic still picture imaging - Resolution and spatial frequency responses - Second Edition
- ISO 12233 Photography - Electronic still picture imaging - Resolution and spatial frequency responses - Second Edition
- ISO 6328 Photography - Photographic Materials - Determination of ISO Resolving Power - Second Edition; Corrected and Reprinted 09/01/2000
- DIN ISO 18901 Imaging materials - Processed silver-gelatin-type black-and-white films - Specifications for stability (ISO 18901:2010)
- DIN 4512-8 Photographic sensitometry, determination of optical density; geometric conditions for transmission density
- DIN ISO 18901 Imaging materials - Processed silver-gelatin-type black-and-white films - Specifications for stability (ISO 18901:2010)
- ISO 6328 Photography - Photographic Materials - Determination of ISO Resolving Power - Second Edition; Corrected and Reprinted 09/01/2000
- ISO 6328 Photography - Photographic Materials - Determination of ISO Resolving Power - Second Edition; Corrected and Reprinted 09/01/2000
- DIN ISO 18901 Imaging materials - Processed silver-gelatin-type black-and-white films - Specifications for stability (ISO 18901:2010)
- DIN 4512-8 Photographic sensitometry, determination of optical density; geometric conditions for transmission density
- DIN ISO 18901 Imaging materials - Processed silver-gelatin-type black-and-white films - Specifications for stability (ISO 18901:2010)
- DIN ISO 18901 Imaging materials - Processed silver-gelatin-type black-and-white films - Specifications for stability (ISO 18901:2010)
- DIN 4512-8 Photographic sensitometry, determination of optical density; geometric conditions for transmission density
- DIN 4512-8 Photographic sensitometry, determination of optical density; geometric conditions for transmission density
- DIN 51009 Optical atomic spectral analysis - Principles and definitions
- DIN 50451-5 Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 5: Guideline for the selection of materials and testing of their suitability for apparatus for sampling and sample preparation for the determination of trace elements in the range of micrograms per kilogram and nanograms per kilogram
- Картотека зарубежных и международных стандартов
Deutsches Institut fur Normung e. V.
Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 3: Determination of 31 elements in high-purity nitric acid by ICP-MS
N 50451-3
Автоматический перевод:
Проверка материалов для полупроводниковой технологии - определение следов элемента в жидкостях - часть 3: Определение 31 элемента в hochreiner азотной кислоте посредством MS ICP
Эта норма вкладывает процесс к определению важных для полупроводниковой технологии элементов Al, ас, Ba, Би, Около, Cd, Co, Cr, Cu, Fe, Ga, Hf, В, K, Li, мг, Mn, пон., Ni, Nb, Pb, Sb, Sn, Sr, Ta, Ti, вольт, Zn и Zr в азотной кислоте в области следов, причем как метод определения масс-спектрометрия с индуктивно соединенной плазмой применяется как источник ионов (МИСС ICP).
Описанные процессы считаются для металлических чистых участий меры 100 ng/кг до 10 000 ng/кг. Процесс отработавшего пара после 5.3 применим также на другие испаряемые жидкости, если повторные нормы нахождения Analyte лежат между 70% и 130%.
ПРИМЕЧАНИЕ Эта норма может применяться также для следующих элементов, если установленные для этих элементов статистические параметрические данные процесса соответствуют требованиям из части 12.
