IEC TS 62622 Nanotechnologies – Description, measurement and dimensional quality parameters of artificial gratings - Edition 1.0
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International Electrotechnical Commission
Nanotechnologies – Description, measurement and dimensional quality parameters of artificial gratings - Edition 1.0
N TS 62622
Annotation
This technical specification specifies the generic terminology for the global and local quality parameters of artificial gratings, interpreted in terms of deviations from nominal positions of grating features, and provides guidance on the categorization of measurement and evaluation methods for their determination.
This specification is intended to facilitate communication among manufacturers, users and calibration laboratories dealing with the characterization of the dimensional quality parameters of artificial gratings used in nanotechnology.
This specification supports quality assurance in the production and use of artificial gratings in different areas of application in nanotechnology. Whilst the definitions and described methods are universal to a large variety of different gratings, the focus is on one-dimensional (1D) and two-dimensional (2D) gratings.
Автоматический перевод:
Нанотехнологии – Описание, измерение и размерные качественные параметры искусственного gratings - Издание 1.0
Эта техническая характеристика определяет универсальную терминологию для общих и локальных качественных параметров искусственного gratings, интерпретируемого с точки зрения отклонений от номинальных позиций трения особенностей, и дает представление о классификации методов измерения и оценки для их определения.
