ASTM F390 Standard Test Method for Sheet Resistance of Thin Metallic Films With a Collinear Four-Probe Array
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ASTM International
Standard Test Method for Sheet Resistance of Thin Metallic Films With a Collinear Four-Probe Array
N F390
Annotation
This test method covers the measurement of the sheet resistance of metallic thin films with a collinear four-probe array. It is intended for use with rectangular metallic films between 0.01 and 100 µm thick, formed by deposition of a material or by a thinning process and supported by an insulating substrate, in the sheet resistance range from 10 2 to 104 / (see 3.1.3).
This test method is suitable for referee measurement purposes as well as for routine acceptance measurements.
The values stated in Si units are to be regarded as the standard. The values given in parentheses are for information only.
This standard does not purport to address the safety concerns, if any, associated with its use. It is the responsibility of whoever uses this standard to consult and establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
Автоматический перевод:
Метод стандартной пробы для листового сопротивления тонких металлических фильмов с коллинеарным множеством с четырьмя исследованиями
Этот метод тестирования покрывает измерение сопротивления листа металлических тонких пленок с коллинеарным массивом с четырьмя зондами. Это предназначается для использования с прямоугольными металлическими фильмами между 0.01 и 100 мкм толщиной, сформированное депонированием материала или процессом утончения и поддерживало изолирующей подложкой в диапазоне сопротивления листа от 10 2 до 104 / (см. 3.1.3).
