ISO TR 19319 Surface chemical analysis - Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods - Second Edition
Данный раздел/документ содержится в продуктах:
- Техэксперт: Машиностроительный комплекс
- Картотека зарубежных и международных стандартов
- ISO 18115-2 Surface chemical analysis — Vocabulary — Part 2: Terms used in scanning-probe microscopy - First Edition
- 01
- 71
- ASTM E1217 Standard Practice for Determination of the Specimen Area Contributing to the Detected Signal in Auger Electron Spectrometers and Some X-Ray Photoelectron Spectrometers
- Картотека зарубежных и международных стандартов
International Organization for Standardization
Surface chemical analysis - Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods - Second Edition
N TR 19319
Annotation
This Technical Report describes:
a) Functions and their relevance to lateral resolution:
1) Point spread function (PSF)
2) Line spread function (LSF)
3) Edge spread function (ESF)
4) Modulation transfer function (MTF)
5) Contrast transfer function (CTF)
b) Experimental methods for the determination of lateral resolution and parameters related to lateral resolution:
1) Imaging of a narrow stripe
2) Imaging of a sharp edge
3) Imaging of square-wave gratings
c) Physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy — see Clauses 5 and 6.
Автоматический перевод:
Поверхностный химический анализ - Основной принцип приближается к определению боковой резолюции и точности в основанных на луче методах - Второй Выпуск
