CENELEC EN 62047-4 Semiconductor devices - Micro-electromechanical devices - Part 4: Generic specification for MEMS
Данный раздел/документ содержится в продуктах:
- Техэксперт: Машиностроительный комплекс
- Картотека зарубежных и международных стандартов
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- CENELEC CLC/TR 62685 Industrial communication networks - Profiles - Assessment guideline for safety devices using IEC 61784-3 functional safety communication profiles (FSCPs)
- ISO 13849-1 CORR 1 Safety of machinery — Safety-related parts of control systems — Part 1: General principles for design TECHNICAL CORRIGENDUM 1 - Second Edition
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- CENELEC CLC/TR 62685 Industrial communication networks - Profiles - Assessment guideline for safety devices using IEC 61784-3 functional safety communication profiles (FSCPs)
- ISO 13849-1 CORR 1 Safety of machinery — Safety-related parts of control systems — Part 1: General principles for design TECHNICAL CORRIGENDUM 1 - Second Edition
- CENELEC CLC/TR 62685 Industrial communication networks - Profiles - Assessment guideline for safety devices using IEC 61784-3 functional safety communication profiles (FSCPs)
- ISO 13849-1 CORR 1 Safety of machinery — Safety-related parts of control systems — Part 1: General principles for design TECHNICAL CORRIGENDUM 1 - Second Edition
- SNV SN EN ISO 13856-1 Safety of machinery - Pressure-sensitive protective devices - Part 1: General principles for design and testing of pressure-sensitive mats and pressure-sensitive floors
- Картотека зарубежных и международных стандартов
European Committee for Electrotechnical Standardization
Semiconductor devices - Micro-electromechanical devices - Part 4: Generic specification for MEMS
N EN 62047-4
Annotation
This part of IEC 62047 describes generic specifications for micro-electromechanical systems (MEMS) made by semiconductors, which are the basis for specifications given in other parts of this series for various types of MEMS applications such as sensors, RF MEMS, excluding optical MEMS, bio MEMS, micro TAS, and power MEMS. This standard specifies general procedures for quality assessment to be used in IECQ-CECC systems and establishes general principles for describing and testing of electrical, optical, mechanical and environmental characteristics.
This part of IEC 62047 aids in the preparation of standards that define devices and systems made by micromachining technology, including but not limited to, material characterization and handling, assembly and testing, process control and measuring methods. MEMS described in this standard are basically made of semiconductor material. However, the statements made in this standard are also applicable to MEMS using materials other than semiconductor, for example, polymers, glass, metals and ceramic materials.
Автоматический перевод:
Полупроводниковые устройства - Микроэлектромеханические устройства - Часть 4: Универсальная спецификация для MEMS
Эта часть IEC 62047 описывает универсальные спецификации для микроэлектромеханических систем (MEMS), сделанный полупроводниками, которые являются основанием для спецификаций, данных в других частях этого ряда для различных типов приложений MEMS, таких как датчики, RF MEMS, исключая оптический MEMS, био MEMS, микро TAS и питание MEMS. Этот стандарт определяет общие процедуры для качественной оценки, которая будет использоваться в системах IECQ-CECC, и устанавливает общие принципы для описания и тестирования электрических, оптических, механических и характеристик среды.
